Used TEL / TOKYO ELECTRON CS-600 #9399468 for sale

ID: 9399468
Vintage: 1999
Plasma cleaner 1999 vintage.
TEL / TOKYO ELECTRON CS-600 is a photoresist equipment that provides a comprehensive and advanced solutions for patterning with precision. This system is designed to offer a fully automated process flow with the highest levels of performance, safety and reliability. The unit is a combination of advanced lithography tools and processes that enables accurate patterning with the highest yield. TEL CS-600 includes a photo-alignment machine, a scanner, a needletrack exposure tool, two chambers, and two baking station. The photo-alignment asset provides precise alignment of photomasks and substrates. This allows for the most efficient patterning, ensuring the very highest yield. The scanner uses high-powered optics to capture and focus, then project and repeat the pattern onto the wafer. The needletrack exposure model consists of two exposure heads, a dispense head, and a set of small needles which are used to draw patterns on the photoresist. The two chambers work together in a series to apply the photoresist, then to develop and remove the resist material. The first chamber holds the dispersion tanks, where the photoresist is mixed and dispensed onto the substrate. The chamber also includes a shutter allowing the resist to be exposed to the pattern and develop. After exposure, the wafers are then transferred to the second chamber which is equipped with an aerodynamic dryer, a waste water contamination equipment, and a chemical removal chamber. The baking station is also highly automated and integrated into TOKYO ELECTRON CS-600 system. During baking, a temperature controlled environment is maintained in order to ensure the uniform curing and stability of the photoresist. The baking station can also be used in other processes such as etching, etchback, and cleaving. CS-600 is designed for rapid prototyping and advanced micro-fabrication processes. It is especially effective for 3D printing processes when used in conjunction with other machines. The combination of the advanced lithography processes and the automated process offered by TEL / TOKYO ELECTRON CS-600 provides a more efficient, reliable and high performance way to produce technically complex products.
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