Used TEL / TOKYO ELECTRON CS450 #9269602 for sale

TEL / TOKYO ELECTRON CS450 is a high performance photoresist equipment specifically designed for high end semiconductor device processing. TEL CS450 uses advanced lithography technology which enables precise pattern modifications to be achieved using a highly sophisticated photoresist system. TOKYO ELECTRON CS 450's most notable feature is its high resolution coating process. It is equipped with a state of the art coater which coats thin films of the photoresist with precision and in parallel making it an ideal choice for mass manufacturing of high end semiconductors. Highly accurate thin film coating is ensured by controlling deposition parameters such as contact pressure, rotation, and substrate speed. The temperature of the process chamber is also accurately regulated to ensure that the photoresist is correctly evaporated and cured for proper interpretation of light intensity variations. TOKYO ELECTRON CS450 is also equipped with an advanced energy source for the illumination process. It has an in chamber laser unit which utilizes Ultraviolet Laser Diode (ULD) Technology to provide an optimal dose of energy for the exposure process of the photoresist. This allows for faster wafer exposure and higher throughput when compared to traditional exposure sources. The ULD Technology also ensures fast and reliable exposure of various patterns without any adjustments due to the uniform output of the laser. TEL CS 450 also features an ultra-clean environment. It has a Class 10000 (Class 1) cleanroom, which provides an environment free from any particle contamination, therefore preserving the ultra-clean conditions necessary for semiconductor devices. To further maintain the cleanliness of the environment, CS 450 is also equipped with numerous microfilters and back pumping systems. Overall, CS450 is a reliable and highly advanced photoresist machine designed for the mass manufacturing of high end semiconductor devices. Its high resolution coating process, reliable energy source, and ultra-clean environment make it an ideal choice for producing high quality and high precision semiconductor devices.