Used TEL / TOKYO ELECTRON CS450 #9269603 for sale
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TEL / TOKYO ELECTRON CS450 is a photoresist equipment designed for a variety of lithography applications. The system is equipped with a progressive scan motor, an optimized scanner, and a resist processor, making it a highly versatile piece of equipment. It is capable of utilizing both positive and negative resists on a variety of substrates with a mask size of up to 80 × 80 mm. The progressive scan motor of TEL CS450 is designed to minimize the time needed to form a pattern with overlying photoresist layers. This motor offers repeatable and reliable processes with minimal operator intervention. Its alignment accuracy of ± 2 μm and repeatability of ± 0.3 μm substantially reduces the time it takes to pattern substrates and obtain quality results. The scanner of TOKYO ELECTRON CS 450 is a large-area pipeline transfer device. This device allows users to achieve dynamic control over the optical irradiance striking the resist layer. Furthermore, this unit includes an ISO-certified resist dispense and resist slice processor, providing reliable and consistent resist composition while ensuring a clean and consistent layer on the mask or substrate. The machine also accommodates both higher- and lower-resolution features in conjunction with running at multiple wavelength exposure conditions. TOKYO ELECTRON CS450 also comes with an advanced technique for automatic positioning of intermediate masks during exposure of the lithography tool. This feature makes it easy to adjust and fine-tune optical options, ensuring accurate resolution and uniform patterning across substrates. CS 450 is ideal for smaller laboratories, as it is easy to set up and use due to its programmable, user-friendly touchscreen control panel. Additionally, this asset has a low operating cost and is capable of running up to six substrates in parallel, thus improving throughput. As such, it is an excellent choice for those looking for a cost-effective, yet reliable photoresist model for their lithography projects.
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