Used TEL / TOKYO ELECTRON CS450 #9269607 for sale
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TEL / TOKYO ELECTRON CS450 is a photoresist equipment that enables users to apply photoresist to substrates with precision and accuracy. This photoresist system is based on a 'slit-scan' technique, whereby a curing beam of UV light is moved in a 'rake' fashion over a photoresist-coated surface. This enables the user to control the depth and thickness of the photoresist layer, while eliminating other variables such as substrate displacement. TEL CS450 Photoresist Unit is composed of four main components: the vibration isolator, slit-scanning UV light source, x-y scanning motion stages, and the photoresist controller. The vibration isolator utilizes an adaptive damping machine to maximize the tool's accuracy and reduce the applied force when moving over a substrate, ensuring that the substrate is not damaged. The slit-scanning UV light is a vacuum ultraviolet (VUV) laser, which produces a light of a specific wavelength (195-205nm) to activate the photoresist material. This wavelength is then evenly spread out across the surface by x-y scanning motion stages to achieve the desired photoresist depth and layer uniformity. The photoresist controller allows for the adjustment of the asset's parameters, such as scan speed, pass depth, and pass rate. This controller also allows the user to monitor the photoresist material as it is curing, to ensure the desired results are being achieved. The model also features an auto-calibration function, which automates the calibration process, and allows users to work faster and more efficiently. TOKYO ELECTRON CS 450 is also known for its high photoresist uniformity, precise coating thickness, and its low reworking rate. Overall, CS 450 is a reliable and efficient photoresist equipment that enables users to quickly and accurately apply photoresist to a variety of substrates. The system's slit-scanning technique, advanced components, and adjustable parameters make it an ideal unit for many applications that require precise levels of photoresist coating. This machine is able to produce results that meet user's exact requirements with greater consistency and efficiency than was previously possible.
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