Used TEL / TOKYO ELECTRON CS450 #9269625 for sale

TEL / TOKYO ELECTRON CS450 is a photoresist equipment which utilizes a small particle absorption method to provide high resolution processing capabilities. Photoresist is a light sensitive material which is used to create patterns on a substrate. TEL CS450 system employs a unique method of using small particles of titanium-silicate powder dispersed in an organic solvent to create a vacuum across an exposure field's defined area. Laser light is then applied, causing the particles to absorb the light and creating images on the wafer. TOKYO ELECTRON CS 450 is designed for semiconductor fabrication and produces features as small as 0.3 μm. The unit enables high uniformity of exposure and a high speed for photoresist coating and exposure. The machine allows for precise control over the exposure parameters and processes, making it ideal for high volume production with excellent yields. The tool is designed to ensure reliable and consistent results over time and is regularly monitored to ensure performance. TEL CS 450 is suitable for a number of applications, including direct write e-beam lithography, advanced packaging, and other applications requiring high resolution photoresist patterning. The asset integrates physical vapor deposition capabilities. The coating process contains a substrate transfer chamber, pre-coat chamber and post coat as well as a control station, a wafer cleaning station and a gas injector. Furthermore, CS 450 is capable of substrate temperatures up to 180°C for nitride, dielectric, and metals. The model also features process windows for temperature, time, pressure and thickness which can be adjusted for each layer of processing. In addition, CS450 offers excellent process characteristics with short cycle times, which meets the highest standards of consistency. The equipment features low thermal load, allowing for a higher thermal budget for processing, which in turn helps to reduce cost and increases speed. Lastly, the system's easy to use interface makes it user friendly and efficient.