Used TEL / TOKYO ELECTRON CS450 #9269628 for sale
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TEL / TOKYO ELECTRON CS450 photoresist equipment is a semi-automated deposition system for use in semiconductor fabrication processes. The unit is designed to provide precision deposition of photoresist materials with customized, user-defined processes. The machine consists of a Controller Module with an integrated Operator Panel, a Substrate Processing/Photoresist Handling Module, a Vacuum Deposition Module, an Optical Alignment Module, and a Detector Module. The Controller Module contains a Windows-based software control that allows users to define and store custom deposition profiles and monitor the tool parameters. The Substrate Processing/Photoresist Handling Module is responsible for the substrate handling and pre-treatment processes. It includes a thermal unit and special purpose cassettes for holding substrates. The Vacuum Deposition Module is designed to deposit photoresist materials or other thin film materials onto the substrates. It uses a low-pressure, diaphragm-controlled deposition technique for uniform thin film deposition. The Optical Alignment Module provides alignment of the substrate in relation to the deposition source. This module includes a camera for detecting the position of the substrate or wafer, and a movable optical alignment device for the precise registration of the substrate. Finally, the Detector Module measures the thickness of thin films deposited on a sample wafer. Overall, TEL CS450 photoresist asset is a streamlined, cost-effective model for performing photoresist deposition in a variety of semiconductor fabrication processes. The equipment has multiple user-friendly features such as integrated process control, pre-treatment, and vacuum deposition components for precision thin-film deposition. Additionally, the system incorporates an optical alignment module to ensure the proper alignment of substrates for uniform film deposition. The detector module ensures the correct thickness of the deposited photoresist materials. Combined, these features make TOKYO ELECTRON CS 450 the ideal unit for thin film deposition in semiconductor fabrication processes.
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