Used TEL / TOKYO ELECTRON CS500 #9269635 for sale

TEL / TOKYO ELECTRON CS500
ID: 9269635
Developer system DECO LE4000A.
TEL / TOKYO ELECTRON CS500 is a high-performance photoresist equipment used in semiconductor and microelectronic applications. The photoresist system utilizes a combination of advanced imaging optics, high-precision and robust mechanics, and advanced software. The result is an exceptionally robust and reliable platform that can support a wide range of resist processing requirements. TEL CS500 utilizes Digital Beam Projection (DBP) technology to provide high-precision exposure of the photomask on to the substrate. This technology ensures uniform exposure of the respective structures and the repeatability of the pattern. Additionally, the unit uses controlled intensity illumination and optimized optics method to reduce glare, spatially-dependent illumination and high-resolution imaging to increase production speed and increase yields. TOKYO ELECTRON CS 500's highest resolution level is achieved through the use of sub-micron techniques that accurately reproduce the exact image onto the resist substrate. In addition, the machine is capable of handling thin resist material (as thin as 0.2μm) and features high-precision overlay capabilities with multi-die alignment levels of accuracy. This combination of features and advantages allows users to achieve optimum process parameters for the broad range of resist photolithography applications. CS500's advanced software further enhances the tool's functionality. By enabling users to fully control the asset's parameters and settings during the resist process, it significantly increases the model's accuracy and reliability while drastically reducing operation time. In terms of safety and maintenance, CS 500 is designed with an automatic cleaning equipment to remove debris particles and reduce the risk of contamination. Along with built-in safety interlocks to prevent accidental exposure during process operation, these features greatly enhance user safety. In conclusion, TEL / TOKYO ELECTRON CS 500 is a premium photoresist system that combines advanced optics, high-precision and robust mechanics, and advanced software to support a wide range of resist processing requirements. Utilizing these features, TEL CS 500 is capable of providing high-precision, high-resolution production with maximize yields and minimize operation times.
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