Used TEL / TOKYO ELECTRON CS500 #9269697 for sale

TEL / TOKYO ELECTRON CS500 is a photoresist equipment designed for extreme chemical, mechanical, and thermal stability. The system is composed of two components: TEL CS500 photoresist unit itself, which performs exposure, development, pre-baking and post-baking processes, and the accompanying software, which enables users to adjust recipe and machine parameters. TOKYO ELECTRON CS 500 tool allows for precision exposure and development of photoresists at memory IC chip production facilities. The combination of a highly precise collimated exposure asset and a separate die plasma pre-bake unit provides superb uniformity, repeatability and speed. A fine-threaded height adjustment mechanism provides high precision exposure control. The model also features an automated develop head for a superior results, and is equipped with a built-in film thickness monitor. The accompanying software provides the means to control and adjust all process parameters including mask size, exposure dosage, development time, and pre-baking and post-baking temperatures with the click of a mouse. Recipe parameters can be saved in memory and recalled for future use, making repeatable processing with exact recipes simple. The equipment also incorporates a long life optical slit unit that provides highly accurate leveling along with a film thickness monitor for accurate measurements. Additionally, electronic automatic resist negative control is provided to avoid shock loading during movement and wash-down times. The system offers a compact construction that is easy to install, and provides low maintenance, low energy consumption and reduced noise levels. It is designed to operate in extremely harsh and corrosive environments and is compatible with a variety of chemicals and solvents. The unit possess a high level of chemical, mechanical and/or thermal stability, making it suitable for use in the most rugged of production settings. In conclusion, TEL CS 500 photoresist machine is a high precision, easy to operate tool that offers excellent uniformity and repeatability. Its features and stability make it an ideal asset for memory IC chip production facilities.