Used TEL / TOKYO ELECTRON CS500 #9269721 for sale

TEL / TOKYO ELECTRON CS500
ID: 9269721
System HITACHI LE-4000A Aligner lamp house.
TEL / TOKYO ELECTRON CS500 is a high-end photoresist equipment used for semiconductor device manufacturing. It is a fully automated system which can be used to perform a wide variety of semiconductor processing applications such as patterning, annealing, etching, and deposition. TEL CS500 is an ARCVD (Atmospheric Relation, Chemical, Vapor Deposition) machine which uses a resistive-mask unit for photolithography. It is capable of creating extremely thin layers of photoresist that form the foundation for the creation of active semiconductor devices such as transistors and ICs. The machine can operate in a high-resolution environment with 0.1 µm resolution and a high-throughput environment with a single die rate of 10,000 wafers/hour. The machine can process 100/wafer at once which results in a higher yield of devices due to the automation. TOKYO ELECTRON CS 500 is also designed to ensure maximum process stability and repeatability with its In-Situ Purging Tool (ISPS). This asset provides a redundant flow of premixed process gases with a temperature and pressure stable environment which is crucial for accurate semiconductor device manufacture. CS 500 model includes a fully integrated coater/developer unit designed for optimal process formulation and control. It is designed to cover the entire wafer from edge-to-edge providing uniformity and greater process control. The equipment is also designed for use in a variety of applications, including, but not limited to, the fabrication of MEMS, PCBs, LEDs, bio-sensors, and optical components. The system can also be customized with additional process solutions to meet the various needs of customers. In conclusion, CS500 is a robust and reliable photoresist unit that provides users with advanced capabilities for their semiconductor device processing applications. With its advanced features such as its In-Situ Purging Machine (ISPS), coater/developer unit, high-resolution and throughput capabilities, it is an ideal choice for high-end semiconductor device manufacturing.
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