Used TEL / TOKYO ELECTRON CS500 #9269726 for sale

TEL / TOKYO ELECTRON CS500
ID: 9269726
System HITACHI LE-4000A Oven.
TEL / TOKYO ELECTRON CS500 is an advanced photoresist system used in semiconductor lithography. It is a high precision system that allows users to accurately expose photoresist in various lithography recipes. TEL CS500 offers a range of features to make photoresist processing easier including automatic exposure control and powerful focus control tools. TOKYO ELECTRON CS 500 is designed to accommodate a variety of different types of photoresist including single layer and multi-layer resist formulations. It is capable of exposing patterns in single layer and multi-layer photoresist films with an exposure area of up to 450mm x 450mm. CS500 features a high speed scanning capability that can support up to 0.5 micron line-widths. This is suitable for patterning ultrafine structures in advanced photolithography applications. CS 500 offers a number of other features including a user-friendly graphical user interface, a temperature controlled environment, and various safety functions. The exposure controller provides real-time feedback of the exposure settings to ensure optimal pattern exposure. TEL CS 500 is also equipped with built-in radiometric metrology components that allow users to perform in-situ measurements of the resist film thickness and the resist exposure profile. TOKYO ELECTRON CS500 combines precision and stability to provide superior processing results and an elegant experience for the users. It is designed to reduce waste while offering high yields and repeatable process results. TEL / TOKYO ELECTRON CS 500 is ideal for various industrial and research applications in the semiconductor industry due to its ability to expose patterns of different feature sizes with accuracy and precision. Its various features and robust performance make it an ideal system for photoresist processing.
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