Used TEL / TOKYO ELECTRON CS500 #9269757 for sale

TEL / TOKYO ELECTRON CS500 is a photoresist ashing equipment designed to maximize yield while utilizing leading edge technology. This system is designed to be used in photoresist processing, a critical step in semiconductor device manufacturing. TEL CS500 utilizes a remote plasma source to etch the photoresist with a high degree of precision and accuracy. This enables the operator to define etching time, power and gas flow with a high degree of control. The photoresist ashing unit provides quick cleans with a low thermal budget and a high selectivity rate. The machine provides the means to etch multiple layers of photoresists at one time with a high through-put. This allows for excellent uniformity with a highly reliable process, increasing yield and improving quality. TOKYO ELECTRON CS 500 is a tool that provides the ability to utilizes advanced features like Plasma Lens™ technology used to control the uniformity of beams from the source in order to extract the most optimal directional performance. Its advanced features such as high-accuracy pulse gas control, refined interface (PC or PLC control) and multi-dimension imagers are advancements that increase the processing workload and make the most of the tool's capabilities. TOKYO ELECTRON CS500 is a asset designed to deliver repeatable results and increases the likelihood of meeting customer requirements. This model also provides the means to monitor, monitor and verify the etching process. This helps to also improve quality and reduce costs associated with post etching testing. The easy-to-use interface of TEL CS 500 gives the operator the flexibility to efficiently streamline the ashing process. Furthermore, the incorporation of safety features such as gas monitor, open chamber detection and over pressure protection provide for a working environment that is safe and reliable. In conclusion, TEL / TOKYO ELECTRON CS 500 is an ashing equipment that provides accurate and repeatable results, with a high degree of control, fast cleans and a high selectivity rate. With its impressive capabilities and user-friendly interface, CS 500 can be used to improve the yield and quality of photoresist processing.