Used TEL / TOKYO ELECTRON CS500 #9293647 for sale
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ID: 9293647
Vintage: 1997
Coater / (2) Developer system
For LCD flat panel display manufacture
Track runs Gen 2 (370 mm x 470 mm) panels
Handle (4) cassettes
(3) Robots and transfer stations
SCR / (4) Cools / (7) L Ovens / HMDS
Glass substrate:
Min: 300 mm x 400 mm
Max: 400 mm x 500 mm
Module includes:
(7) Hot plates
(4) Chill plates
HMDS Vapor prime
Megasonic scrubber
Edge bead remover
Specification:
Main controller: NEC 98" Series
Loader / Unloader: (4) Uni-cassettes
(4) Spin coater heads (Coater / (2) Developer / SCR)
Coater unit specification:
Function for one coater head:
Coater cup: Standard cup
Photo resist line: (2) Nozzles
Back side rinse
RRC Fuction
P/R Drain:
Local drain 10L tank
Drain tank with pump
P/R Supply allocation: Bottle / Nozzle
Standard function:
Cup exhaust flow monitor with interlock
Dummy dispense control panel
Chemical flow detection with flow meter sensor
Solvent supply:
(5) Gal canisters
(2) Tanks auto change (Local supply)
DEV Unit specification:
Function for developer unit:
DEV Cup: TEL Standard cup
DEV Line: Nozzle for etch unit
Back side rinse
Top rinse function
EV Drain: Facility drain
DEV Supply allocation: Supply from facility with 200 liter tank
CS500 Standard function cup exhaust flow monitor with interlock
Dummy dispense control panel
Chemical flow detection with flow meter sensor
SCR Unit specification:
Function for SCR unit:
SCR Cup: Standard cup
Dl Line: Nozzle for etch unit with mega-sonic
Back side rinse
Top rinse function
D.I Drain: Facility drain
CS500 Standard function: Cup exhaust flow monitor with interlock
Dummy dispense control panel
Chemical flow detection with flow meter sensor
1997 vintage.
TEL / TOKYO ELECTRON CS500 equipment is an advanced photoresist system for use in the fabrication of semiconductors, integrated circuits and other microelectronic components. It is designed to connect seamlessly with existing manufacturing tools, making it one of the most cost-effective photoresist systems available. At the core of TEL/TOKYO ELECTORN TEL CS500 is its high-efficiency, medium-size chamber unit. Utilizing a high-end, medium-size chamber machine ensures that it operates with a consistent level of performance and is able to precisely control all process parameters. This allows for, reliable and repeatable results throughout the entire process. TOKYO ELECTRON CS 500 utilizes a variety of technologies to ensure the highest accuracy in step and repeat processes, including Optical Lithography, Electrochemical Copying, and Wet Etch Processing. This level of accuracy is essential when making reliable microcircuits with high yields. In addition, this tool is capable of performing high-precision, shadowless exposure. A shadowless exposure is paramount in order to make sure that the finished product is a perfectly accurate replica of the source pattern. CS 500 implements the use of special optical components to further control light saturation, along with programs designed for complex processes and thin-film treatments. The entire process is controlled from the main processing console, which is located near the hardware and contains all the necessary process controls for the operator. This asset is user-friendly, as it can be quickly and easily set up to minimize downtime and increase production levels. CS500 is an incredibly reliable and efficient photoresist model, perfect for manufacturing the highest quality microcircuits. It offers a wide range of process capabilities, making it the ideal choice for any high-precision fabrication project.
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