Used TEL / TOKYO ELECTRON CS500 #9301977 for sale

TEL / TOKYO ELECTRON CS500
ID: 9301977
Vintage: 2005
Coaters 2005 vintage.
TEL / TOKYO ELECTRON CS500 is a photoresist equipment for lithography processing. It is designed for high precision applications such as MEMS, advanced integrated circuits, 3D packaging, and organic light-emitting diodes (OLEDs). The system combines conveyor and multi-zone fully-digital illumination, which allows quick and precise operations to be implemented. TEL CS500 features a motorized stage and a state-of-the-art detector that can measure temperature variations with sub-microradian accuracy. The unit's digital X-Y linear stage provides high stage stability, repeatability, and uniform precision down to sub-micrometer accuracy. TOKYO ELECTRON CS 500 is equipped with a high quality motorized optic machine, a high-quality precision multi-zone illumination tool, and signal sampling and control systems to provide an excellent environment for precise photoresist processing. The motorized optics allow fine adjustment of the optical focusing and alignment when setting up the asset. The multi-zone illumination allows for the precise manipulation of the size and position of the illumination areas, and thereby ensures the precise coverage of the photoresist on the substrate. In addition, the signal sampling and control systems provide accurate control of both the exposure dose and exposure time. Thus, TOKYO ELECTRON CS500 can be used for highly complex and precise photoresist operations. In addition, the model is highly automated and requires minimal operator intervention. The automated conveyor equipment eliminates the need for the operator to feed the substrates. The system can be configured to automatically measure substrate size and substrate placement. Also, the unit provides an automated process monitor and optimization machine, which allows the process parameters to be adjusted and improved quickly for efficient photoresist processing. CS500 is an excellent choice for photoresist processing in high precision applications. It provides an automated process environment that is suitable for both prototyping and production, allowing customers to quickly obtain high-quality results. Its repeatable and reliable operation, combined with the flexibility to customize its settings to suit application needs, make TEL CS 500 an ideal solution for industries such as semiconductors, MEMS, and OLEDs, and any others that require high precision lithography processing.
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