Used TEL / TOKYO ELECTRON CS500 #9411463 for sale
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TEL / TOKYO ELECTRON CS500 is a photoresist equipment which uses a light source to selectively remove the photoresist material resist during the semiconductor device fabrication process. It uses a high-resolution ultraviolet light source with a wavelength of 365nm. The light source is coupled with a high-precision control system and a coating mechanism to ensure that the photoresist is applied in a uniform thickness. The light source illuminates the photoresist film, which is then exposed to an ultraviolet light. The ultraviolet light transfers the image from the light source to the photoresist film. As the photoresist film is exposed, the exposed areas are selectively removed while the non-exposed areas remain intact. TEL CS500 also features pattern alignment capabilities that enable the precise alignment of patterns on the photoresist film. Through its precise positioning unit, TOKYO ELECTRON CS 500 can accurately direct the light source to the appropriate areas of the photoresist film. This alignment capability allows for precise pattern placement with sub-micron accuracy. CS500 also incorporates a curing machine to provide a uniform cross-link between the photoresist material and the underlying substrate. This cross-linking allows the photoresist to remain intact throughout the device fabrication process and ensures that any pattern tasks can be reliably and reproducibly transferred from the photoresist film onto the underlying substrate. By combining a precise light source with its advanced alignment capabilities, TEL CS 500 is able to accurately and reliably remove photoresist material with minimal distortion and contamination. This allows TEL to produce high-precision devices with excellent performance. Additionally, its alignment capabilities, curing tool, and overall asset design make TEL / TOKYO ELECTRON CS 500 an ideal choice for a variety of semiconductor device fabrication processes.
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