Used TEL / TOKYO ELECTRON CS800S #293661853 for sale

TEL / TOKYO ELECTRON CS800S is a photoresist equipment, designed for the development and production of wafer-level devices. It is designed for photolithographic processes, such as mask writing and etching. TEL CS800S is equipped with a high-resolution LaserWriter photomask writer, able to write 10,000 voltage steps over a 0.25um pitch. It can also be used as a high-end e-beam mask writer for ultra-high resolution masks, writing up to 50nm size patterns. The system also includes a large-area post-imaging inspection unit, which enables fast, accurate inspection and analysis of pattern images. TOKYO ELECTRON CS-800S includes an automatically adjustable stage, providing improved lithography accuracy, as well as a wide range of features such as auto-focus, programmable stage spline, etc. In addition, CS800S offers a "Soft Circuit Monitor (SCM)" to measure the optical performance of the mask. SCM can also detect defects in photomasks by measuring their total aerial image intensity and edge sharpness. Using CS-800S machine, the maximum pattern size that can be written is 8" x 10", with line widths down to 0.05um and contact holes down to 0.12um. The tool also offers a 4X reduction in polarization loss, leading to higher circuit yield. In addition to the features mentioned above, TOKYO ELECTRON CS800S also offers a range of advanced features such as an automated resist application, rapid exposure, and advanced resist preheating functions. Furthermore, it is equipped with an automated calibration asset, providing precise control of parameters such as stage displacement and stage spline. Overall, TEL / TOKYO ELECTRON CS-800S is a highly-capable photoresist model, designed for high-resolution photolithographic processes. With its automatic calibration equipment, high resolution laser-writer and post-imaging inspection system, it is suitable for the development and production of wafer-level devices.