Used TEL / TOKYO ELECTRON Lithius i+ #293830618 for sale
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ID: 293830618
Wafer Size: 12"
Vintage: 2005
Coater / Developer system, 12"
2005 vintage.
TEL / TOKYO ELECTRON Lithius i+ is an integrated photoresist processing equipment with features designed to increase productivity while still providing excellent solutions for mask and substrate cleaning and photoresist coating. The system consists of three main parts: the resist pre-treat solution chamber, the resist sprayer, and the light exposure station. The solution chamber is designed to prepare the substrate before it is sprayed with the resist material. In addition to the resist pre-treatment step, the solution chamber is also capable of cleaning and stripping the substrate surface of any existing resist material. This chamber also contains a special reservoir for resist de-scumming to further improve resist adhesion and to prevent resist peeling and pinhole formation during the etching process. The resist sprayer is designed to apply the desired thickness of photoresist on the substrate. The sprayer uses air to atomize the resist material and to ensure a uniform coating in a controlled environment. The unit is equipped with a special adjustment knob to control the spray pattern and droplet size, as well as adjustable nozzles and atomizers. This allows the user to customize the spray application to the exact specifications needed for the particular substrate type. Finally, the light exposure station is designed to transfer the mask design onto the resist material, creating a patterned substrate surface. The station is equipped with a high-resolution laser light source, a microscope magnification stage, and an optional laser alignment machine to maintain accuracy. Additionally, dedicated computer-vision software is included to automate the exposure process and to optimize mask development for the photoresist tool. TEL Lithius i+ is an advanced and comprehensive photoresist asset. Its precise, customizable design provides users with outstanding results in precision mask and substrate preparation and coating. Furthermore, its automated functions increase user productivity and reduce cost by eliminating unnecessary manual labor. With its premium features, TOKYO ELECTRON Lithius i+ is the prime choice for precision substrate preparation and coating.
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