Used TEL / TOKYO ELECTRON Lithius i+ #9198142 for sale
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ID: 9198142
(5) Coaters / (5) Developers system
Accessory box
AC Power box
Spin box
IFBM Box
Cable card
(2) THC
(4) HPB Tower
(4) FFU
(2) HPB Boxes.
TEL / TOKYO ELECTRON Lithius i+ Photoresist Equipment is a full-featured system used for the fabrication of semiconductor devices. It is designed to provide accurate, repeatable deposition of layer-by-layer micrometer-thick photoresist films that lead to high quality wafers and die. The Photoresist Unit is composed of the deposition chamber, the wet bench, the optical viewer, five power supplies and a computer control module. The deposition chamber is the main part of the machine. It uses a "dip-coating" technology to accurately deposit a uniform photoresist film. It also features a viewing window with a built-in vacuum for monitoring the coating process. The wet bench contains the solutions and rinse tanks for the deposition process. It also features a pump for rinsing the photoresist film during the deposition process. The tool is equipped with five separate power supplies to provide the power necessary for the deposition process. It has two high-frequency generators for the application of resistive coating and three low-frequency generators for leveling the resistive film. The power supply also features an analog to digital converter to reduce the level of interference from stray electrical fields. Lastly, TEL Lithius i+ Photoresist Asset is backed by a computer control module. This module allows for easy calibration and prevention of errors during the deposition process. It can also monitor the entire process with real-time data and feedback for better control of the deposition process. In conclusion, TOKYO ELECTRON Lithius i+ Photoresist Model is a reliable and accurate equipment that allows for the efficient production of high quality semiconductor devices. It features an efficient deposition process using dip-coating technology, five power supplies, and a computer control module for easy calibration and process monitoring.
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