Used TEL / TOKYO ELECTRON Lithius i #9283134 for sale
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TEL / TOKYO ELECTRON Lithius i is a photoresist equipment used for substituting traditional photolithography processes. It can be used for creating high aspect ratio structures, down to below 1:1. The system consists of an exposure head, a quartz plate, and a photoresist processor. The exposure head uses UV-Visible light in order to carry out the photolithographic process. This unit is preferred for its superior accuracy, high contrast ratio, and the high level of reflectivity that it offers. For applications such as photolithography for IC/COS and wafer level packaging, the exposure head is simply placed on top of the photoresist processor and then linked through automation to the Quartz plate. Then the photoresist processor supplies the needed material to the quartz plate and exposes it according to the needed pattern. The exposure head also utilizes an advanced optical focusing machine, which helps provide an even intensity distribution for optimal results. Once the desired pattern has been exposed on the photoresist material, it is then transferred to the underlying substrate. To ensure this material does not stick onto the quartz plate, the head uses a soft-touch contact technology. This reduces stress to the photoresist material which helps prevent any undesired peaks or shadows formed during the transfer. TEL Lithius i also offers several other advantages. It has a built-in cleaning tool, allowing for minimal cross-contamination and providing superior printing results. Additionally, it has a low consumption of photoresist, delivering a maximum possible exposure result at a lower cost. Compared to traditional photolithography, TOKYO ELECTRON Lithius i asset offers increased speed and automation technology. Its unique functions allow it to produce structures with improved yields, accuracy, reproducibility, and durability. All this operational efficiency makes this photoresist model one of the most versatile and cost-effective processes available today.
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