Used TEL / TOKYO ELECTRON Lithius i+ #9384058 for sale

TEL / TOKYO ELECTRON Lithius i+ is an advanced photoresist equipment that is designed for applications across the fields of photolithography. It provides optimal performance in high-precision wafer patterning operations for a variety of microfabrication processes. The system offers automated substrate management, precision resist coating and exposure, fast developing, and cleanliness control. TEL Lithius i+ offers extreme precision for micropatterning operations. It features a high-precision laser head with top-level accuracy and repeatability, an advanced dicing unit for automated substrate placement, and a resist coating machine that can handle a wide range of resist. In addition, the tool has a built-in sampler for high-precision verification of exposed patterns and post-exposure bake (PEB). TOKYO ELECTRON Lithius i+ enables faster photolithography processes by allowing precise, high-speed development of photoresist, coupled with a special substrate cleaning unit for preventing residual particles from adhering to the substrates. Furthermore, the asset can precisely measure and control the resist concentration and dispense chemical resist. Lithius i+ has various advanced safety features including an overcurrent sensor, radiation monitor, and software-controlled interlocks. It also has a user-friendly interface and custom functions, which allow for operations to be monitored, managed, and adjusted with ease. In addition, the model is equipped with a real-time data acquisition and analysis equipment that enables quick and easy feedback to the production process. Overall, TEL / TOKYO ELECTRON Lithius i+ is an advanced photoresist system that offers optimal performance in high-precision wafer patterning operations. It features advanced substrate management, fast processing, and precision control over resist concentration and dispense. In addition, the unit is equipped with a user-friendly interface, built-in safety features, and custom functions that make it ideal for a variety of production processes across a broad range of fields.