Used TEL / TOKYO ELECTRON Lithius Pro-I #293759416 for sale

TEL / TOKYO ELECTRON Lithius Pro-I is an advanced photoresist equipment featuring a four-chamber platform, a proprietary HEPTACHEM™ wet-developer chemistry, and an integrated high-resolution mask aligner. The photoresist system can process semiconductor wafers with maximum accuracy and minimal clean-up required. TEL Lithius Pro-I is a fully automated unit with a four-chamber platform to simultaneously process multiple wafers for optimal throughput for high volume wafer production. It features on-board ASML EBR Control Machine, thermal Chambers to ensure uniformity and repeatable processing operations, a potentiostatic speaker for cleaning The wafer, and linked liquid handling and exhaust systems for minimized environmental impact. The HEPTACHEM wet-developer chemistry used in the photoresist tool ensures uniform and repeatable coating processes as well as accurate and consistent coatings of the photoresist. It also eliminates any need to dissolve the photoresist in a chemical prior to application. The unique HEPTACHEM chemistry provides consistent results regardless of the wafer surface quality and film thickness. The integrated high-resolution mask Aligner in TOKYO ELECTRON LITHIUS PRO I asset provides highly accurate alignment of photomasks to the wafer surface. The masked wafers can then be precursed accurately and consistently to further ensure product quality. The combination of four-chamber platform, HEPTACHEM™ wet-developer chemistry, and integrated high-resolution mask Aligner allows wafort manufacturers to take advantage of the advanced photoresist model for making high-quality products with minimal waste and at a fast rate. The equipment is an excellent choice for semiconductor research and manufacturing applications that require accurate process control and repeatable results.