Used TEL / TOKYO ELECTRON Lithius Pro-I #293815848 for sale

TEL / TOKYO ELECTRON Lithius Pro-I is a photoresist equipment designed for advanced lithography processes. It enables highly precise photoresist profiling that meets the exacting needs of sub-50nm features and advanced-node semiconductor manufacturing. The system features a high throughput of 4x8" standard, ultra-high resolution to support a wide range of advanced optical photoresists, and multiple wavelength imaging options to support substrates with different optical characteristics. The Pro-I unit offers a range of process capability and advanced imaging technology to meet the demands of leading foundries. It features ultra-high linearity, dynamic motion and alignment correction, excellent non-uniformity, dynamic focus adjust, and precise overlay without prior calibration. It also supports automated substrate handling with a flexible track, enabling processing of photoresist and other materials with multiple layers. With its advanced interferometry capabilities, it can precisely align mask onto the substrate while maintaining the highest level of accuracy. In addition, its built-in aberration correction ensures profile accuracy and high-resolution imaging with an individually tailored collection of compensators. The Pro-I also features a range of software and hardware options. The automation capabilities, software models, and user interface allow the user to customize the tool for their needs. It also supports advanced techniques, such as high dose OAD to enable feature printing beyond the 0.3 micron size limit, and electron beam lithography for detailed micromachining. In addition, the Pro-I integrates with other TEL processes, such as the Aligner Series, to facilitate seamless setup and easy machine operation. With integrated image analysis and auto exposure, it can accurately identify and transfer photomasks before and after processing. It also features a powerful python execution environment and post-processing software for automated workflow. TEL Lithius Pro-I is the ideal solution for semiconductor manufacturers with advanced requirements. It enables complex photoresist processes with high accuracy, while providing a range of customizable automation and software tools.