Used TEL / TOKYO ELECTRON Lithius Pro-I #9296908 for sale

TEL / TOKYO ELECTRON Lithius Pro-I is a photoresist equipment designed to provide lithographic imaging, film development, and surface cleaning of a wide range of substrates. It is ideal for the fabrication of integrated circuits, MEMS, data storage, and other precision microelectronic devices. The Pro-I consists of three major systems: the main system, the gas box, and the surface cleaning unit. The main machine contains an ultraviolet (UV) light source, a stepper/scanner for imaging, and a vacuum stage for substrate handling. It also provides exposure pulsing, focus synchronization, and filter selection. The gas box offers the necessary gases for photoresist baking, pre-cooling, etching, and post-cooling. The surface cleaning tool offers a brushless, plasma-based cleaning process. The Pro-I is capable of imaging down to 25mm. Its focusing asset is designed to maintain a resolution of < ±1.0μm and a throughput of 16MHz. It can process substrates with a thickness of up to 0.5m. The Pro-I's UV light source can be used to pattern features as small as 0.5μm with a maximum layer thickness of up to 1.5μm. The Pro-I also offers optional features including automatic transmission control (ATC), a waveform generator, dielectric susceptor heating, and a range of exposure heads for use with different UV wavelengths. It has a chemical handling model that reduces the amount of hazardous materials used and recycles chemicals for reuse. It also offers an advanced wafer bumping option to support various types of bumps. The Pro-I is a fully configurable, robust, and reliable equipment designed to meet the highest standards of lithographic imaging and cleaning. It is easy to use, and provides excellent yields, repeatability, and a high degree of automation. It is a reliable and cost-effective tool for fabricating a range of microelectronic devices on a variety of substrates.