Used TEL / TOKYO ELECTRON Lithius Pro V #293823961 for sale
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TEL / TOKYO ELECTRON Lithius Pro V photoresist equipment is ahighly respected work horse of lithography that can be used to manufacture a variety of electronic devices. It is designed to precisely expose and develop a thin film of photosensitive material (photoresist) over a substrate coated with chromium and gold layers. The system is composed of an electron beam column, a heat-treated resist unit, an aligner, and a mask aligner. The electron beam column of TEL Lithius Pro V offers energy ranges of up to 1,600 electron volts. With up to 3X resolution, the machine is capable of achieving feature sizes as small as 0.5 μm. The advanced design of the column enables high throughput and ensures reliable lithography results. The heated resist tool, also known as thermal treatment, ensures that the exposed photoresist remains in place for maximum resolution. The resist is heated up to 200°C before it is exposed to the electron beam, to increase adhesiveness to the substrate. After exposure, the resist is heated further to ensure uniform developments over the whole substrate. The aligners ensure excellent precision when it comes to exposing and resolving complex microscopy tasks. The open-field transmission aligner is capable of resolving features down to 1μm. This makes it ideal for applications such as tunneling transistors. The mask aligner is used to reproduce micro-disks or complex thin film interconnections. TOKYO ELECTRON LITHIUS PROV is fully automated and is compatible with a variety of secure industrial controllers and operating systems. Plus, the asset has extensive user-friendly interfaces and keypad access. With its high quality, precision, consistency, and reliability, LITHIUS PROV is one of the preferred choices in photoresist systems around the world.
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