Used TEL / TOKYO ELECTRON Lithius Pro V #9292955 for sale
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ID: 9292955
Wafer Size: 12"
Vintage: 2011
(4) Coater / (8) Developer system, 12"
CIM: SECS, GEM
Process: 193 nm Immersion
(4) BCT BARC Coaters
(4) ITC
(12) CSWP
(6) CGRA
(4) CADH
(12) CPRP
(5) CHHA
(12) SCPL
WEE
BWEE
(16) FOUPs
Fire suppression
Power box
SHINWA Temperature and Humidity
(2) Chemical cabinets (Solvent, developer)
Handler system:
(4) PRA
CRA
PRAI
IRAI
(2) MPRA
Options:
WISC
WISD
2011 vintage.
TEL / TOKYO ELECTRON Lithius Pro V is a photoresist equipment designed to provide advanced lithography capabilities for a wide range of applications, including microelectronics, semiconductor, and wafer fabrication. The system uses a highly precise optomechanical unit with a light source, lenses, and an automated moving stage to optimize volumes patterned wafers and nanofabrication. Unlike conventional stepper-scanner systems, TEL Lithius Pro V uses a computer-controlled algorithm to determine the exact positioning of wafers, lenses and the light source during patterning. This enables tremendous accuracies in line widths and heights and is highly effective in producing patterned angles and thick lines. TOKYO ELECTRON LITHIUS PROV machine integrates a wide range of software and hardware features, including a comprehensive overlay alignment concept, advanced lithography simulations and control, and a high-performance image processing engine. The tool also includes a range of core accessories, such as a light source, vacuum chamber, and a user-friendly operation console. To ensure optimal performance of TEL / TOKYO ELECTRON LITHIUS PROV asset, various parameters, such as exposure energy, overlay alignment accuracy, and exposure sequence, are adjustable and are controlled by a sophisticated process that includes the integration of a user-friendly GUI, automated patterning, and advanced lithography simulation. Using TEL LITHIUS PROV model, customers gain the benefits of improved lithography yields, reduced cycle time, and higher product quality. The equipment is also capable of automatic alignment corrections, accelerated baking and curing, plus precise patterning for high-precision devices, such as high-performance logic and memory devices. In addition, customers of Lithius Pro V system can take advantage of an extended day-light development time as one exposure provides small, site, layer-specific patterning. With its improved accuracy, LITHIUS PROV unit also delivers a high degree of design flexibility; allowing customers to produce a range of lithography designs on even their most intricate designs. Overall, TOKYO ELECTRON Lithius Pro V is an advanced photoresist machine designed to provide customers with the precision and error-free patterning they need in order to create highly complex, high-quality products in a fraction of the time and cost.
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