Used TEL / TOKYO ELECTRON Lithius Pro V-i #293603567 for sale

TEL / TOKYO ELECTRON Lithius Pro V-i is a cutting-edge photoresist equipment designed for the highest precision lithography needs. Photoresist systems are incredibly important for the semiconductor industry as they allow for the etching of features into various materials. TEL Lithius Pro V-i uses project exposure to create a pattern from a donated mask. This is done using a pattern generator, which uses a revolutionary grating light valve (GLV) technology to produce up to 8.5 each nanometers of resolution at an exposure dose of 12.0 mJ/cm2 in those 40-nm lines. Additionally, the Pro V-i utilizes variable numerical aperture (VNA) control and coherence control of the partial coherence illumination system to achieve optimal overlay accuracy. The Pro V-i also offers improved exposure accuracy with a maximum of ±1 nm of focus monitoring and a ±1 mJ/cm2 dose measurement. In addition, the Pro V-i supports a number of processes such as ashing, cleaning, and baking of the resist material. The unit also offers full power overload protection from the scan machine, exposure tool, and manipulator, ensuring that the equipment is not damaged by surges. The Pro V-i also boasts a range of additional features such as its advanced control electronics, which provide features such as customizable alarms, security parameters, and data archiving, as well as an extensive array of interfaces for increased asset automation. Finally, the Pro V-i includes an Automated Focus Control Interface for improved focus accuracy, and a set of Removable Mask Tabletools for clean removal of masks between exposures. Overall, TOKYO ELECTRON LITHIUS PRO VI is an incredibly advanced photoresist model designed for the highest precision lithography needs. Its array of features and user-friendly design make it a versatile, reliable tool, making it an ideal choice for the modern semiconductor industry.