Used TEL / TOKYO ELECTRON Lithius Pro #293821725 for sale
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TEL / TOKYO ELECTRON Lithius Pro is a photoresist equipment that provides a reliable, cost-efficient solution for process engineers requiring ultra-precise imaging results. This system incorporates advanced automation to deliver repeatable performance in sensitive semiconductor applications. TEL Lithius Pro is built with a field compliant Bruker FXF 280 Autoimage scanner, providing high image resolution and sensitivity. Its advanced automation functions make it easier to operate and track the unit's wafer exposure history. This machine is fitted with an automated wafer handler for rapid transfer of micro wafers between process chambers, and a wafer mapping tool to ensure accurate alignment. The powerful AIT (Atomic Level Image Trackers) software embedded in the asset enables engineers to monitor each run with precision. This powerful tool can be used to track process characterizations on the fly and prevent unexpected wafer exposures. The automated dual-focus mechanism ensures consistent imaging quality and repeatability across all substrates. TOKYO ELECTRON Lithius Pro also offers real-time temperature monitor and control to facilitate temperature-critical processes. The integrated advanced beam control tuning feature helps maintain a high throughput and ensure imaging precision. An automated exposure mode preset library also provides added flexibility and ensures engineers can quickly set up various photolithography applications. This powerful model is ideal for use in various industries, including semiconductor and microelectronic applications. The user-friendly interface makes it easy to use, while the advanced automation ensures precision and repeatability. Lithius Pro is an excellent choice for any engineer requiring a reliable photolithography solution.
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