Used TEL / TOKYO ELECTRON Lithius Pro #293827599 for sale

ID: 293827599
Vintage: 2009
Photolithography track 2009 vintage.
TEL / TOKYO ELECTRON Lithius Pro is a photoresist equipment used in semiconductor microfabrication processes. Photoresist is a coating material used to pattern devices in an integrated circuit. It is made up of a polymeric film that is light sensitive and can be applied to a substrate such as a silicon wafer or flat panel display. When exposed to light, regions of the photoresist are hardened and the unexposed areas may be removed by a chemical etchant. This process is used to pattern substrates so that transistors, capacitors, and other components can be made at minimal size and with accuracy. TEL Lithius Pro is a high-performance photoresist system optimized for a wide variety of films, substrates, and photo-polymer materials. It includes an advanced optical engine with a wide range of optional optical attachments to maximize process and masking capabilities. The unit offers a choice of software-controlled laser exposure, or conventional film exposure as a powerful alternative. The laser sources used with the machine allow high resolution microelectronic imaging for a wide range of applications, including the sub-micron lithography process. TOKYO ELECTRON Lithius Pro is equipped with a range of optional components designed to handle the process needs of various photoresist materials. These include a liquid developer tank with a diffusion chamber, a spray agitation tool, a post exposure adjustment unit, and a dry film jacketing unit. The asset offers the latest advancements in model functionality, such as high accuracy and repeatability for reproducible results. Lithius Pro also offers secure data storage and digital signature verification capabilities as well as an Application-specific feature set for a variety of photoresist processes. In conclusion, TEL / TOKYO ELECTRON Lithius Pro is an easy-to-use and high-performance photoresist equipment that is designed to provide efficient and precise micro-fabrication results in a wide range of industries. It is an effective solution for patterning substrates while also featuring robust security for sensitive data.
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