Used TEL / TOKYO ELECTRON Lithius Pro #9024209 for sale

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ID: 9024209
(3) Coater / (6) Developer system.
TEL / TOKYO ELECTRON Lithius Pro is a photoresist equipment that enables advanced semiconductor device fabrication capabilities. It is designed to meet the most advanced and demanding requirements for fine line patterning of sub-25 nanometer chips. The system is loaded with features that facilitate advanced device fabrication. These include advanced optics for more precise resolution and placement accuracy, a high vacuum environment to reduce outgassing and particle contamination, high-speed liquid crystal displays for accurate line monitoring, and a time-of-flight ion source for more precise doping control. It is designed to produce the most intricate features with the highest levels of precision and uniformity. The unit also has a multitude of other features for repeatability, stability, and controllability. It is composed of several components that contribute to the machine's performance. At its basic level, the tool includes two light sources, a light source mask, and a light source driver. This provides the necessary illumination for advanced photolithographic imaging. Additionally, it includes a laser source, an electron beam source, and high vacuum pumps to ensure that the environment is ideal for the production of very small devices. The asset also has a precision stepper stage for patterning. This provides the necessary accuracy and repeatability demanded to maintain specifications when transferring a pattern from the mask to the wafer. Finally, the model utilizes computer numerical control (CNC) technology as well as software to regulate the process. This helps to ensure the proper operation of all the components of the equipment and to ensure that all of the specifications are met. TEL Lithius Pro photoresist system is an advanced device fabrication technology that combines precision optics and high-speed liquid crystal display to produce tiny and intricate features with repeatability, stability, and controllability. Its advanced components, CNC technology, and software ensure that it produces results that meet the most demanding requirements.
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