Used TEL / TOKYO ELECTRON Lithius Pro #9263047 for sale

TEL / TOKYO ELECTRON Lithius Pro is a photoresist equipment that is used for photo-mask structure patterning in semiconductor device, flat panel display, and micro-electromechanical system (MEMS) processing. The unit is comprised of three integrated components - a light source, mechanical motion machine, and projection optics. Using a high-power light source, TEL Lithius Pro is capable of generating ultra-short pulsed light and broad spectrum visible light, allowing for targeted overlays and exposure. The light has high uniformity and high intensity for consistent results. In addition, the light source is capable of dynamic power modulation, enabling users to very accurately control the exposure dose. The mechanical motion tool with positioning accuracy of up to 0.3nm, can precisely move the wafer during exposure under high-vacuum conditions. The patented clear-edge design has been designed to minimize mask-edge light leakage, and helps achieve quality results even when working with narrow pitch patterns. Finally, providing well-controlled optical illumination, the projection optics allow for precise control of the pattern magnification and depth-of-field. This asset incorporates sophisticated optical correction algorithms to eliminate aberration, ensuring the highest performance and reliability. TOKYO ELECTRON Lithius Pro photoresist model offers reliable, high performance patterning for both single-layer and multi-layer resist. Its high-precision positioning accuracy and power-modulation allows users to achieve reproducible and repeatable patterns. Additionally, the clear-edge design minimizes mask-edge light leakage, making it an ideal tool for applications requiring very high precision and accuracy.