Used TEL / TOKYO ELECTRON Lithius #293587437 for sale

TEL / TOKYO ELECTRON Lithius is a photoresist equipment designed for wafer processing applications. It is designed to provide a high resolution patterning capability with low defectivity and minimal environmental impact. The system works by applying a photosensitive chemical coating, known as a photoresist, onto the wafer. The photoresist is then exposed to a UV light source, usually located in the lithography chamber, which irradiates specific areas of the wafer. The areas exposed to the light become insoluble to a developer solution, while those areas not exposed to the light remain soluble. The developer solution is then used to selectively remove that coatings exposed to the light and thereby create a fine pattern on the wafer. TEL Lithius unit includes a variety of process modules to ensure that the photoresist coating, exposure, and developer solution applications all occur at the correct times and settings. The machine also includes a number of imaging components, including an optically compensated CCD camera, polarization filter, automatic zone mapping, and digital image processing software. All of these components work together to ensure that the process parameters for photoresist application and exposure are accurate. TOKYO ELECTRON Lithius photoresist tool has been designed to be highly reliable as well as cost-effective. The asset is constructed with stainless steel components, which are corrosion and impact resistant, as well as a high degree of turbulence control to reduce the amount of particles that might be introduced into the lithography chamber. In addition, the photoresist model features a high degree of automation and offers flexible integration into semiconductor process systems. In short, Lithius photoresist equipment provides a high resolution and repeatable patterning capability with low defectivity and minimal environmental impact. The system's reliable construction and high degree of automation make for reliable, cost-effective wafer processing.