Used TEL / TOKYO ELECTRON Lithius #293589532 for sale

TEL / TOKYO ELECTRON Lithius is a photoresist equipment used to build nano-scale structures on a base material such as a silicon wafer. Photoresists are materials with unique properties that change when exposed to certain wavelengths of light. By controlling the wavelength and intensity of the light exposure, features can be accurately defined. TEL Lithius is capable of a variety of exposure techniques, including contact, proximity, and off-axis. Contact exposure is used for basic shapes or openings, while proximity and off-axis are more suitable for patterning complex shapes. TOKYO ELECTRON Lithius uses a focused beam of light to provide high resolution patterning with sub-micron accuracy. This system uses a sophisticated optical unit with a high-power light source. The machine integrates an advanced laser scanner, a spinning polygonal mirror, and a wide zoom range. This ensures precise exposure of photoresists to allow for the creation of high aspect ratio structures. Lithius also incorporates advanced process controls, such as Off-Axis Shift Compensation, which automatically adjusts exposure parameters to decrease common resolution issues due to off-axis exposure. This tool also allows for auto-alignment of patterns and auto-exposure control to allow for precise and consistent replication of patterns across the wafer. TEL / TOKYO ELECTRON Lithius is also compatible with a wide range of photoresists and can be used for a variety of applications including semiconductor, silicon, MEMS and NEMS devices, and microfluidic systems. This asset is compact, flexible, and provides precise processing of nano-scale structures. The integration of an advanced optical model, advanced process controls, and compatibility with a range of photoresists make TEL Lithius an ideal solution for creating nano-scale structures.