Used TEL / TOKYO ELECTRON Lithius #293589534 for sale
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ID: 293589534
Wafer Size: 12"
Vintage: 2005
Coater / Developer system, 12"
2005 vintage.
TEL / TOKYO ELECTRON Lithius is a photoresist equipment used in photolithography, a process used in the fabrication of integrated circuits and other systems used in the electronics industry. TEL Lithius system uses light through a reticle to project circuit patterns onto photoresist layers. Photoresist is a light-sensitive material used to create electronic circuits. It is a polymer material that becomes chemically altered when exposed to light, which allows it to take the shape of the projected pattern. The process begins with the deposition of a polymer layer on the surface that the circuit will be built on. The photoresist layer is made up of a photosensitive film that has been applied to a substrate. The next step of the photolithography process involves creating a mask (called a reticle) over the substrate that contains the circuits that need to be created. The mask is created from a design that is used by the photolithography unit. To project the circuits onto the photoresist layers, the mask is aligned with the photoresist layer and a series of light sources are used to expose the photoresist material. TOKYO ELECTRON Lithius machine uses an optimized design for the illumination of photoresists. It ensures that light is transmitted efficiently over the whole surface area and provides uniform exposure to the photoresist. This process results in an accurate replica of the mask pattern on the photoresist. After the exposure process is complete, the photoresist is developed which results in an opaque layer. This photoresist mask is then kept as it is and used to etch the circuit onto the substrate. To complete the circuit patterns, a dry or wet etch is used to etch the pattern onto the substrate. The etching process is performed either with a chemical solution that removes the exposed areas or a mechanical tool such as a jig or drill to cut away the material. After etching, the photoresist mask is removed, resulting in the completed circuit pattern on the substrate. Lithius tool offers reliable, accurate, and repeatable results as it ensures uniform exposure of the photoresist, enabling accurate, precise patterns to be created. It is a highly efficient and automated process that is being used in the manufacture of electronic systems in the electronics industry.
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