Used TEL / TOKYO ELECTRON Lithius #293595663 for sale

TEL / TOKYO ELECTRON Lithius is a photoresist equipment designed to enable precise patterning of photoresist thin films on various substrates and enable lithography, etching and direct-write applications. The system utilizes a projection and diffusion exposure source, together with a liquid-film forming unit, known as a spin-coat unit, to control the dissolution and deposition of the photoresist material. The exposure source creates focused light beams of the required ultraviolet (UV) spectrum, which are directed onto a quartz windshield. After passing through this lens, the UV light is filtered by two diffusers before arriving at the surface of the photoresist film. The photoresist machine is designed to enable precise patterning of photoresist thin films on a range of substrates. This includes silicon, glass, ceramic, plastic, copper and aluminum. The tool also has the capabilities to process a number of semiconductor devices including DRAM and DRAM-cache memories, CMOS image sensors, and MEMS. The projection and diffuse exposure created by the asset can have a resolution as low as more than 1μm. This low resolution allows smaller nano-patterns with high accuracy, which is important during device fabrication. The model is completed with the spin-coat unit. This unit is responsible for the deposition and dissolution of the photoresist film and allows an even film deposition on the substrate. The spin-coat unit applies the photoresist via an air or vacuum-assisted spinning technique. TEL Lithius photoresist equipment is highly advanced and has proven capability to efficiently and accurately process an array of substrates. This system allows device fabrication companies to develop high-quality lithography, etching and direct-write devices with a high resolution and increased efficiency.