Used TEL / TOKYO ELECTRON Lithius #293595672 for sale

TEL / TOKYO ELECTRON Lithius is a photoresist equipment designed to produce semiconductor devices with reliable electrical properties. The system is composed of four modular components: a substrate holder, a scanner, a light source, and a control unit. The substrate holder holds a semiconductor wafer. It is designed to position and rotate the wafer in a controlled environment, in order to ensure the uniform coating of the light-sensitive photoresist material on the wafer's surface. The scanner is responsible for exposing the photoresist material. It is composed of a motorized stage with an x-y gantry that moves the wafer in a linear fashion and precisely controls the dose, polarization, size, and shape of the illuminating beam. The light source is responsible for generating the illuminating beam and for controlling its intensity and shape. A commonly used light source is a laser-driven electron beam. The control unit is the heart of the unit. It is responsible for controlling and managing the entire photoresist process. It provides information to the other components, directs the overall workflow and collects data concerning the photoresist material. By making use of the above-mentioned machine components, TEL Lithius is able to produce semiconductor devices with a high level of uniformity and reliability. This tool is capable of producing highly complex patterns, dense structures, and even sub-micron structures. Furthermore, the process can be fully automated, offering excellent repeatability and uniformity of patterns. Overall, TOKYO ELECTRON Lithius is a reliable and highly efficient photoresist asset that is used for producing semiconductor devices with superior electrical properties.