Used TEL / TOKYO ELECTRON Lithius #293763045 for sale
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ID: 293763045
Wafer Size: 12"
Vintage: 2006
Coater / Developer system, 12"
(2) Block machines
CRA robot
PRA robot
(3) IRAM robots
IRAS robot
(5) Front Opening Unified Pods (FOUP)
(2) Temperature controllers
(3) Cabinets:
Resist
Developer
Coater
Power box
2006 vintage.
TEL / TOKYO ELECTRON Lithius is a highly advanced photoresist equipment made by TEL, also known as TOKYO ELECTRON. TEL Lithius system was designed as a tool for various lithography applications such as display and logic integrated circuit (IC) manufacturing. The unit enables precise patterning of various thin film materials as well as photoresist products. TOKYO ELECTRON Lithius machine comes with several advanced features that allow users to quickly and accurately pattern a wide array of thin film materials. The tool is equipped with a dynamic focus control which allows users to accurately and quickly adjust the focus of the asset for the highest possible patterning accuracy. It also features a programmable wafer carrier, which allows users to move the wafer to the required position with minimum manual intervention. When using Lithius model, users can choose from two different mask types. The first is a small mask which is used for patterning small areas of the wafer. The second is a large mask which can be used for patterning larger areas. Users can choose from a variety of exposure habits including both single and multiple exposure cycles. Additionally, the equipment includes a variety of laser power settings, which allow users to set the level of power needed for their particular application. The system also offers a range of lens options to optimize patterning performance for different applications. The lens size and design can be adjusted to maximize the resolution of features for the application. Additionally, users can select from a range of illumination sources and collect the target iso-doses. The unit also includes a range of safety features to keep operators and users safe, including several safety sensors that monitor air quality and temperature of the machine. The tool also emits a loud alarm to let operators and users know if the asset is reaching an unsafe level. Finally, the model includes a robust maintenance and calibration program to keep the equipment running optimally. Overall, TEL / TOKYO ELECTRON Lithius is a highly advanced and reliable photoresist system that allows users to quickly and accurately pattern small and large areas of thin film materials. The unit offers a range of features that enable users to adjust the focus, select exposure cycles, and set a range of lens and illumination settings. Additionally, the machine features numerous safety features to ensure the operator's safety. Ultimately, TEL Lithius is a highly intuitive and reliable tool for lithography applications.
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