Used TEL / TOKYO ELECTRON Lithius #293766619 for sale

TEL / TOKYO ELECTRON Lithius
ID: 293766619
Wafer Size: 12"
Vintage: 2007
Coater / Developer systems, 12" 2007 vintage.
TEL / TOKYO ELECTRON Lithius is a series of photoresist systems developed by TEL (TOKYO ELECTRON Ltd.) with advanced features that make it the industry standard for photolithography applications. These systems provide precision patterning of substrates such as glass, crystalline, polyimide and polysilicon with accurate alignment and exposure control. The main components of the equipment include a photoresist processing environment, an exposure system, an alignment unit, a process control machine, and a post-processing tool. The photoresist processing environment is specifically designed to handle airborne hazardous chemical processing in a safe, controlled environment. This ensures that photolithography jobs can be reliably completed with accuracy and precision. The exposure asset provides a tailored light intensity distribution for the application of photolithography patterns. This is done with an array of high-precision, USHIO light sources to generate an evenly distributed light beam over the entire substrate area. The exposure process can be adjusted as needed to achieve fine patterning with excellent alignment accuracy. The alignment model provides precise substrate positioning and movement during the exposure process. A set of highly sensitive detectors determines the exact position of the substrate before and after the exposure process, allowing for accurate overlay and pattern registration. Additionally, a CCD camera is used to perform pattern recognition and imaging analysis. The process control equipment performs all the necessary calculations for precise photolithography processing. This system can auto-calibrate for precise mask positioning, calculate ideal exposure parameters, and adjust for small temperature and humidity variations. Finally, the post-processing unit handles any additional processing requirements such as developing, etching, and protective coating. This machine provides the required UV and chemical protection before and after processing to maintain the integrity of the substrate. The result of using TEL Lithius photoresist systems is reliable and high-quality results. Photolithography applications that require precise patterning, accurate alignment, and repeatability are performed with unparalleled precision and precision. The tool is robust enough to handle complex applications and enable the efficient realization of complicated electronic devices.
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