Used TEL / TOKYO ELECTRON Lithius #9102163 for sale
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ID: 9102163
Electron Cassette Career Station Block (CSB)
Copper Exposed
Career Station Block Robotics Arm CRA
(4) Front Opening Unified Pods (FOUP)
(4) Mapping Units
Motion Control Unit
Mitsubishi Computer.
TEL / TOKYO ELECTRON Lithius is a photoresist equipment that uses illuminators to create lithography patterns on wafer substrates in the invention of semiconductor devices. It is designed to reduce the time it takes to create a lithography pattern on a wafer substrate and create sharper, more precise lithography patterns. To create these high-precision patterns, TEL Lithius system uses a combination of integrated optics, advanced light sources, a light transmission unit, and proprietary lithography technologies including electron beam exposure, and I-line, Deep UV and EUV illumination sources. By using these technologies, the machine can generate dense, uniform, and high-precision lithography patterns over a large area. The integrated optics enable the light sources to create very precise, localised patterns, and the light transmission tool helps to transmit the light as accurately as possible. The lithography asset also uses several proprietary technologies including its electron beam exposure technology, which makes use of highly concentrated electron beams to create patterns over a large area. It also makes use of I-line, deep UV and EUV illumination sources with wavelength emission from 248 nm to 13.5 nm. The model also comes with a range of overlay accuracy and process control features, including automated wafer mapping, scan angle control, and temperature compensation. Together, these features help to ensure that the patterns created by the lithography equipment are accurate and precise. TOKYO ELECTRON Lithius is designed as a highly efficient system for patterning wafer substrates. The combination of integrated optics, light sources, and proprietary technologies help to create extremely precise lithography patterns, reducing the time needed for patterning. The unit is also highly accurate, with automated wafer mapping and other features to ensure that patterns are precise and uniform. Together, these features make Lithius an ideal machine for creating high-quality lithography patterns.
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