Used TEL / TOKYO ELECTRON Lithius #9105625 for sale
URL successfully copied!
Tap to zoom
ID: 9105625
Develop Process Station
P/N: DEV ASSY
Includes:
FRAME ASSY BASE - 5085-412352-13
BASE(MIDDLE) ASSY - 5085-412349-12
CUPBASE ASSY - 5087-404181-12
3PIN ASSY - 5087-403368-12
COVER(CUPBASE) ASSY - 5085-409612-15
OUTCUP ASSY - 5087-401364-13
ARM(L) ASSY - 5087-400475-16
BASE(SCAN) ASSY - 5085-412389-11
MOTOR(L) ASSY - 5087-402854-11
PULLEY ASSY - 5085-404442-12
WASHERNOZZLE ASSY - 5085-405111-11
AIR OPE ASSY(BR) - 5085-407386-16
SCAN(ARM-B) ASSY - 5087-403489-15
COVER ASSY - 5085-412524-12
FRONTBOX ASSY - 5085-412353-13
E-BOX(DEV) ASSY - 5087-403481-11
SUPPORT ASSY - 5085-412354-13
FRAME ASSY MOTOR - 5087-400478-15
DUCT(DEV)ASSY - 5085-412380-13
CHUCK(SS) ASSY - 5085-411385-11
ARM(R) ASSY - 5087-400476-16
MOTOR(R) ASSY - 5087-400477-11
PULLEY ASSY - 5085-404442-12
NOZZLE TOP(NLD) ASSY - 5085-413053-11
LD BATH ASSY - 5085-404315-17
SUPPORT ASSY(NLD) - 5085-401943-11
WATERBLOCK ASSY(NLD) - 5085-404692-14
VALVE ASSY(AMF) - 5087-400486-15
CUP ASSY (LD) - 5085-409683-13
MANIFOLD ASSY (4LINE) - 5085-404368-13
SOLENOID(BLOCK) ASSY - 5085-408453-11
GUIDE(SCAN) ASSY - 5085-409482-11.
TEL / TOKYO ELECTRON Lithius is a photoresist equipment used in a variety of industries, such as semiconductor devices and displays. TEL Lithius provides high-precision material deposition and fine patterning with its advanced lithography system. The unit is based on a high-resolution projector, which projects a chemically reactive light image onto the deposited thin film material, creating a pattern with high precision. In addition, the projector is synchronized with a multi-sized laser to ensure optimal resolution. This machine can be used to produce intricate designs with a minimum feature size resolution of 0.1µm or less. Using a combination of wet etching and chemical etching processes, the photoresist residue is easily removed. This ensures that the residual photoresist is not transferred to other parts of the device, which could cause electrical failures and other production errors. TOKYO ELECTRON Lithius tool also includes an advanced control asset for precise film deposition and patterning. The model software is capable of controlling a number of parameters, such as the laser-projector synchronization, the etching parameters, and other equipment settings. In addition, the system software allows for the integration with external databases to provide data for quickly optimizing the production parameters. In addition, the unit contains a high-precision vacuum chamber, which allows for optimal atmosphere control for the development and processing of the photoresist layer. This vacuum chamber also reduces air bubbles and residual photoresist. Finally, Lithius machine comes with a user-friendly interface, which allows for easy and intuitive operation. The user may also customize a sequence for the tool to process a single material or multiple materials at once, as well as to monitor the progress of the production process using a built-in monitor. Overall, TEL / TOKYO ELECTRON Lithius asset is an advanced photoresist model for high-precision material deposition and fine patterning, which is highly customizable and offers optimal atmosphere control for photoresist development and processing.
There are no reviews yet