Used TEL / TOKYO ELECTRON Lithius #9105632 for sale

TEL / TOKYO ELECTRON Lithius is an advanced photoresist equipment designed to improve lithography solutions for a range of applications. This system combines an optical source with a patented dry resist unit to create patterns on the wafer with higher precision than traditional wet development. The machine utilises a high-intensity UV light source with a sophisticated optics tool for a uniform illumination field. The applied resists are designed to be dry-processable and reactive to the light in a manner not seen in wet development. The result is an extremely uniform and highly reliable patterned surface. The dry resists of the asset can be photo-patterned through a range of steps including pre-sensitisation, a reaction to the UV illumination, and post-development. A unique feature of TEL Lithius model is that each step can be automated and monitored through the use of software and image analysis tools. This allows users to accurately quantify the performance of photoresist processes to ensure higher accuracy and accuracy predictability. TOKYO ELECTRON Lithius equipment is designed with a number of manufacturing and functional resources to ensure consistent performance. These resources include a number of camera systems that provide the user with an accurate in-depth view of their resists, quartz lenses that guarantee a stable and laser-free illumination of the wafer, and a granular adjustment feature which grants the user control of the illumination energy. The system also includes features for routine maintenance, ensuring that the unit remains consistent over time. In addition to facilitating highly accurate uniformity in its patterning, Lithius machine also offers an improved overlay accuracy of 0.25 µm or better, providing users with improved line and space structures. Other features of the tool include a lower cost-of-ownership, no requirement for photoresist solvents, and the ability to operate in green fabs. With a broad range of features from automation to maintenance, TEL / TOKYO ELECTRON Lithius asset is designed for the consistent production of microelectronics devices and components.