Used TEL / TOKYO ELECTRON Lithius #9111796 for sale

TEL / TOKYO ELECTRON Lithius is a reliable photoresist equipment from TEL, a leading global provider of semiconductor fabrication equipment and materials. Photoresist systems are used in the fabrication of semiconductor devices, specifically during lithography processes where photoresist imaging is used to transfer circuit patterns onto silicon wafers. TEL Lithius is designed for high precision and reliability, offering unique features that enable improved process performance. The system is designed to reduce common issues associated with photoresist exposure, such as uneven exposure and pattern distortion. It does this by using an advanced optical unit with a large numerical aperture (NA) and high wavelength accuracy. It also has a programmable Z servo machine which can precisely adjust the wafer position based on a pre-defined design. The optical and Z servo systems can be easily calibrated for improved accuracy and repeatability. TOKYO ELECTRON Lithius offers stability and reliability through a wide range of temperature and humidity conditions, thanks to its automated temperature and humidity control tool. This helps ensure that the photoresists used for imaging retain its properties even after long exposure times. The asset is also equipped with a safety function that automatically terminates the exposure process if the temperature and humidity levels exceed preset thresholds. Additionally, the model has a camera mode that allows users to easily monitor the photoresist process. This feature provides real-time digital imaging data which can be used to quickly detect any defects or errors during the lithography process. The camera mode can also be used to adjust the exposure parameters for improved image quality. Overall, Lithius is a reliable photoresist equipment that offers features designed to improve lithography process performance. It has an advanced optical system for improved layer resolution and stability, a programmable Z servo unit for precise wafer positioning, automated temperature and humidity control for stability, and a camera mode for digital imaging. These features and the improved process performance make TEL / TOKYO ELECTRON Lithius an ideal choice for semiconductor fabricators.