Used TEL / TOKYO ELECTRON Lithius #9204825 for sale

TEL / TOKYO ELECTRON Lithius is an advanced photoresist equipment developed by TEL (TOKYO ELECTRON Ltd.) and endorsed by Nikon Metrology. It is designed to handle the most challenging manufacturing and production processes. It eliminates the need for scanning and is significantly faster than traditional photoresists. TEL Lithius system uses a software-controlled solution-based design to generate precision patterns and images. Its advanced wafer-level lithography technique ensures a very high resolution and accuracy with a feature size of 0.1 to 50μm. It also offers a wide line width control (as small as 0.15μm) and superior line width variation performance. TOKYO ELECTRON Lithius unit provides a low-cost solution for mask-less photolithography, and allows for high-precision photoresist applications. The machine uses proprietary software to control every aspect of the photoresist process. This includes the pattern generation, wafer layout, wafer processing and mask optimization. Lithius is based on a bottom-up deposition process that begins with a uniform layer of resist coating the entire wafer. The layer is then selectively exposed to a light source, such as an ebara or quartz lamp, for a predetermined amount of time. After exposure to this light, the photoresist is then developed and processed in order to fabricate patterns and products. TEL / TOKYO ELECTRON Lithius tool is capable of producing high-precision and ultra-fine structures with fine lines and high aspect ratios. It is also very energy efficient and minimizes waste during the process. Additionally, it is very easy to use and requires minimal training and maintenance. TEL Lithius is a reliable and cost-effective solution for high-end semiconductor and MEMS/nano device manufacturing. It is suitable for use in many industries including biomedical, electronic, automotive, telecommunications, displays and printed circuits. The asset can be used to create very complex patterns and components and is ideal for mass production of small parts.