Used TEL / TOKYO ELECTRON Lithius #9235182 for sale

TEL / TOKYO ELECTRON Lithius, also known as the Large Area Fine Patterning Platform (LFtec), is a photolithography equipment that is used to create uniform, micron-sized patterns on large semiconductor wafers. The system uses an advanced thermal imaging process to expose patterns in photoresist with high throughput efficiency. The LFtec is capable of producing patterns with patterns that range from 5 to 20 µm and with alignment accuracy within 1 µm. The LFtec unit is based on a photolithography process, consisting of three major parts; the illumination optics, the photoresist, and the photo alignment. First, the illumination optics illuminate a specific pattern onto the photoresist. Then, the photoresist absorbs the light to produce a chemical reaction, which depends on the type of photoresist. The photo buffer aligns the patterns relative to each wafer. TEL advanced thermal imaging process, which is used by the LFtec machine, helps improve the throughput efficiency. It features an infrared light source to quickly heat the photoresist, which helps expose the pattern in a much faster manner compared to traditional photolithography equipment. It also features a high accuracy preciously controlled spatial filter to reduce the line width distortion of the patterns. In addition, the LFtec tool is designed to easily handle multiple wafer sizes ranging from 200 mm to 12 inch wafers. It also provides a complete integration with real-time data is to ensure its accuracy and repeatability. The unique imaging abilities of the LFtec asset make it an ideal choice for creating complex patterns on large wafers. The uniform and precise patterns created from the model make it highly suitable for many advanced applications such as integrated circuits (ICs), LED displays, and other technologies.