Used TEL / TOKYO ELECTRON Lithius #9235261 for sale

TEL / TOKYO ELECTRON Lithius is an advanced photoresist equipment used in the semiconductor industry to create circuit elements on a substrate. Photoresist, or light-sensitive chemicals that react to light, is used to create patterned structures on a substrate during the process of lithography. TEL Lithius system is composed of a stepper unit, a lithography illumination source, and a resist coating head. The stepper is responsible for controlling the motorized stages that move the chip and the substrate, as well as providing a precise means to rotate, shift, and focus the substrate. The stepper also includes additional options to allow multi-dimensional alignment of the substrate and movement of the chip during operation. The lithography illumination source provides a light source for the exposure, or imaging, of the photoresist. It provides various patterning lamps depending on the characteristics of the photoresist, and also includes an alignment board for testing the positional accuracy of the structure. The last component of the unit is the resist coating head, which is responsible for accurately coating the resist onto the substrate. This machine provides a sensor-controlled transfer flow rate to ensure an even coating of the resist onto the substrate. The header is capable of coating an area of up to 50 mm in width, and a resolution of up to 0.01 µm. TOKYO ELECTRON Lithius machine has been used for decades to create high resolution structures on chipsets which are used in a variety of applications such as mobile phone components, semiconductor test boards, and OLED displays. The photoresist tool works by selectively degrading the exposures of the resist on the substrate depending on the intensity of the light source, creating high-resolution structures of any shape or size. The advanced technology offered in Lithius asset provides precise control and accuracy that allows users to minimize any errors in the fabrication of their structures.