Used TEL / TOKYO ELECTRON Lithius #9252496 for sale

TEL / TOKYO ELECTRON Lithius is a photoresist equipment designed for direct UV exposure in photolithography applications. This system uses UV LED sources to achieve high resolution exposures, as well as making possible exposure times in the microsecond range to achieve high throughput processing. The unit also features a user-friendly touch-panel interface, enabling easy program setting and monitoring of photolithography parameters. The photoresist machine is made up of components that work together to prepare substrates for microfabrication. It features a UV lamp platform, a high-resolution stepper tool and a UV-sensitive resist. Additionally, the asset uses a high-speed, high-resolution zoom lens to focus the light source. The UV LED lamp has a long lifetime and can be dimmed according to the application. In addition, the lamp can be cooled for maintenance and longer UV LED transmission. The zoom lens model provides diffraction-limited resolution and offers a wide range of step and repeat configurations. It also features an auto-focusing equipment that keeps the light focused on the substrate throughout the exposure process. The precision of the stepper system is essential to achieving microfabrication. This unit can be set and monitored through the user-friendly touch-panel interface. It provides a range of exposure configurations, from single shots to multi-exposure series. Additionally, this machine ultrasonically rotates substrates and is capable of handling substrates up to 360mm square. Lastly, the photoresist tool utilizes a chemically amplified positive-tone resist. This resist is designed to be sensitive to UV light and provide precision in desired patterns. Chemically amplified means that it can withstand a range of exposure energies due to secondary reactions promoting its solubility. These secondary reactions, however, are also the source of unwanted undercutting, leading to undesired and unpredictable patterns. All together, TEL Lithius photoresist asset combines precision stepper controls, UV LED lighting, an advanced zoom lens model and chemically amplified positive-tone resists to provide an efficient platform for achieving high resolution photolithography processing.