Used TEL / TOKYO ELECTRON Lithius #9260375 for sale

TEL / TOKYO ELECTRON Lithius is a photoresist equipment designed for use in semiconductor device fabrication. The system utilizes a two-chamber wet bench format, with one chamber for pre-treatment and a second chamber for the developer. The pre-treatment chamber can treat substrates with a combination of acid and base treatments as well as p-type or n-type doping. The developer chamber contains the photoresist solution, allowing the user to apply photoresist layers to the substrate with precise thickness and profiles. Photomasks are used for patterning the photoresist layer, with the profile of the mask and the intensity of the light source determining the thickness and profile of the applied photoresist layer. The unit includes an equipment controller, which monitors the temperature and flow rate of the various solutions as well as the parameters of the light source, substrate, and photomask. This allows for accurate control of each step in the process, allowing for repeatable and precise results. In addition, the machine also includes a graphical user interface (GUI), which allows the user to view and select tool parameters and recipes for their application. In addition, the asset allows the user to save recipes and process parameters for future use. This ensures a consistent process, even when changes need to be made to a particular recipe or process parameter. The model also has an autofocus feature, which ensures that the proper depth of focus is achieved during the photoresist coating procedure. This feature prevents any surface image distortions due to improper focus. TEL Lithius is an extremely precise photoresist equipment, allowing for the fabrication of high-accuracy and high-quality semiconductor devices. The system's intuitive user interface and robust procedural parameters allow for highly accurate and repeatable results, ensuring an efficient and reliable process.