Used TEL / TOKYO ELECTRON Lithius #9273942 for sale
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ID: 9273942
Wafer Size: 12"
Vintage: 2007
System, 12"
EFEM
Blower module: PM1 and PM2
Air intake
Power rack
Light curtain
Accessory
2007 vintage.
TEL / TOKYO ELECTRON Lithius is a photoresist equipment designed to replicate complex patterns onto complex substrates. The system is designed for semiconductor manufacturing, producing parts of semiconductor devices such as transistors, diodes, and resistors. The unit is composed of several different components. Most notably, the photoresist is a light-sensitive material which is often applied etch-resistant to the substrate. This material then reacts only to a specific wavelength of light. In TEL Lithius machine, a semiconductor laser is used to send a light beam which is directed onto the substrate. This allows for precise pattern replication and accurate feature implementation. TOKYO ELECTRON Lithius tool is further augmented by various other components. One of the most important components is the image aligner, which ensures that the light beam is precisely aimed directly onto the photoresist on the substrate. This feature eliminates misalignment errors and increases accuracy during the replication process. Furthermore, a coupler obtains the necessary information to be sent to the laser from the computer. Lithius asset also features a range of adjustable settings which are designed to improve accuracy and ensure optimal device production. These settings allow for optimization of the laser's power, scanning speed, and focal length, allowing for higher-resolution images. Furthermore, various filters and masking techniques are available as needed to improve accuracy. In addition to the various components available, TEL / TOKYO ELECTRON Lithius model also includes an easy-to-use graphical user interface which allows for operation of the equipment without the need of an operator. The GUI allows users to program the necessary functions and commands to create the desired template and transfer the necessary data to the laser. For example, users can program the type of photoresist to use, the laser power, the focal length of the beam, the exact address of the substrate and other necessary functions. Overall, TEL Lithius system is designed for accurate and precise production of semiconductor devices and components. The unit offers advanced features such as laser light beam manipulation and adjustable settings to ensure superior performance. Furthermore, the easy-to-use graphical user interface offers convenience and ease of use. TOKYO ELECTRON Lithius machine is sure to be an essential tool for semiconductor professionals.
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