Used TEL / TOKYO ELECTRON Lithius #9275274 for sale
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ID: 9275274
Wafer Size: 12"
Vintage: 2006
(2) Coater / (5) Developer system, 12"
2006 vintage.
TEL / TOKYO ELECTRON Lithius is a photoresist equipment designed for use in the fabrication of integrated circuits. This system is based on the advanced lithography technology from TEL and offers a comprehensive suite of photoresist processes for advanced semiconductor devices. It is designed to enable the rapid and precise etching of the resist for patterning, enabling high resolution and superior features to the semiconductor device. The unit is capable of providing highly precise back side alignment which makes it an ideal choice for reducing overlay errors and tight overlay control. The machine can continuously monitor and adjust the condition of the resist for optimum results. This assists in obtaining the desired patterns with a higher accuracy. The tool also ensures uniform etching of the patterns ensuring that the features are accurately etched. The photoresist asset has an advanced preparation process which assists in the preparation of the resist surface prior to etching. It is equipped with a static elimination device which minimizes contamination on the surface while providing the best quality etching process. The model is equipped with a single wafer loading equipment, which makes it possible to reduce loading time and reduce the risk of exposing the wafers to greater contamination levels. The system also has a dielectric panel which acts as an insulator to protect the wafer as well as a built-in heating unit for maintaining a consistent temperature for easier operation. The machine can be operated easily with a graphical user interface and user-friendly controls. It is also designed to be interfaced with other systems which operates on open fieldbus systems. This ensures that data can be exchanged seamlessly between the two systems. The tool is a reliable, safe and easy to use, providing a cost-effective solution for the production of advanced semiconductor devices. This asset is ideal for use in new product development, design engineering, or production applications.
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