Used TEL / TOKYO ELECTRON Lithius #9286669 for sale

ID: 9286669
Wafer Size: 8"
Coater / Developer system, 8".
TEL / TOKYO ELECTRON Lithius is a photoresist system used to create a photomask from a computer-aided design. It is a digitalized form of photolithography, the process of transferring an image onto a light-sensitive material. The unique system from TEL enables users to produce high resolution photomasks from polygons and die pattern data with superior accuracy and repeatable high performance. The process starts with the polymer photoresist and its corresponding layer mask. The photoresist is spread across the desired surface and then exposed to light from a high-energy-light-source, such as a ultraviolet laser. After a predetermined period of time, the energy has been sufficiently absorbed by the photoresist, leading to a photo-chemical reaction forming its corresponding fine-resolution photoresist pattern. The mask, which contains the desired pattern to be transferred, is aligned and registered on the photoresist-coated surface. The image-transfer process is opened and the light from the laser activates the exposed parts in the photoresist. Specific chemical reactions occur generating dissolved areas in the photosensitive solvent, which then allow the patterns to be transferred from the mask onto the photoresist. After the transfer is complete, the dissolved areas are filled with a confined color, forming an accurate pattern on the photoresist. After that, the components of the photosensitive layer are selectively washed off to clean up the pattern. The generated images with the desired shape are then cut into the correct size and shape. Finally, the photomask is completed and is ready for use in a variety of applications such as for the production of integrated circuits, sensor elements, connectors and other elements. TEL Lithius is an excellent system for transferring images into a photomask. Its ability to create high resolution patterns and repeatable high performance sets it apart from regular photolithography. As the market is increasingly demanding high quality products, so too is the demand for precise image-transfers of any size, making TOKYO ELECTRON Lithius ideal for intricate photomask production.
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