Used TEL / TOKYO ELECTRON Lithius #9296645 for sale
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ID: 9296645
Coater / Developer system
Career station block
Process block
Coat process station
Develop process station
Plate process station
Interface block.
TEL / TOKYO ELECTRON Lithius is a high-performance photoresist equipment that enables photolithography processes used in the production of semiconductor microcircuitry. The system is designed to provide clean deposition of photoresist on the substrate, allowing for precise patterning and etching of the desired circuit design. It is also able to minimize any contamination during the process through the use of chemical solvent rinse baths and isopropyl alcohol brushes. The unit is composed of several components, including an excimer laser, a substrate holder, a photo sensitive resist coating machine, and a shadow mask. The excimer laser is used to create ultraviolet light pulses that are transmitted through the shadow mask (which contains the circuit design) to the substrate surface. The light intensity is adjustable to allow for accurate resolution of the circuit design. The substrate holder is used to maintain a consistently level substrate surface, allowing for precise coating. The photo sensitive resist coating tool is used to uniformly deposit the photoresist on the substrate. The resist reacts when exposed to ultraviolet light, becoming insoluble. This allows for the patterning of the desired circuit features. The isopropyl alcohol brush is used to scrub the substrate surface to remove any excess, insoluble photoresist, as well as any contaminating particles. To further ensure cleanliness, the asset is equipped with chemical solvent rinse baths, providing a final rinse before the substrate is transferred to its next phase of production. All of these components combined make TEL Lithius an effective photoresist model, capable of producing high-resolution microcircuits. It is an invaluable tool in the production of advanced microelectronic devices.
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