Used TEL / TOKYO ELECTRON Lithius #9296904 for sale
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ID: 9296904
Wafer Size: 12"
Vintage: 2006
Coater / Developer systems, 12"
2006 vintage.
TEL / TOKYO ELECTRON Lithius is an advanced photoresist equipment specifically designed for nanotech manufacturing. It enables the revelation of the smallest details on semiconductor wafers, allowing for precise control of the fabrication process. The system works by using a low-cost, high-performance solution for photoresist deposition as well as imaging of the smallest structural features on the wafer. The main components of TEL Lithius unit are the Wafer Monitor, which measures the resistivity of the wafer surfaces for optimal resistivity uniformity, and the Image Generator, which can produce clean, repeatable images on the wafer. The Image Generator is composed of two main elements, the vacuum interface and the image mask. The vacuum interface is responsible for setting the wafer to the proper deposition pressure, allowing a uniform resistivity across the entire wafer. The image mask is coated with a metal thin film to control the deposition of the photoresist, producing a precise pattern that reflects the layout of the circuit board. In operation, TOKYO ELECTRON Lithius machine exposes the wafer to a light source in order to unveil the desired pattern on the wafer. The photoresist deposited onto the wafer is then developed, allowing the details of the developed image to be accurately inspected for accuracy. Following the inspection, the wafer is then transferred to the lithography station, where it is aligned with the desired circuit board layout. Finally, the wafer is etched to create the desired components. Lithius offers an outstanding photoresist tool that allows precise fabrication at the nanoscale level. Its Wafer Monitor and Image Generator components guarantee that the wafer is properly regulated while the patterning process is meticulously monitored, ensuring both the high-quality of the end results and its repeatability. As such, it is an invaluable asset for nanotechnology manufacturers looking for efficient, precise solutions with automated control.
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